Upgrades | Customer Support – Lam Research Blog
We enhance the capability and productivity of your toolset and extend tool-lifetime by upgrading your existing equipment to lower costs or meet the process requirements for your next generation products.
Upgrades are offered for a range of Lam Research products, including plasma etch, thin film deposition, photoresist strip, and wafer cleaning systems. Our upgrade portfolio includes options to maximize the capability as well as productivity of the installed base. The following types of upgrades are available:
Technology Upgrades are designed to extend the useful lifetime of the installed base by upgrading existing equipment to process next-generation products:
Productivity Upgrades enhance system output of good product by increasing uptime, throughput, and yield at lower operational costs:
For additional information, please visit MyLam® or contact your local Lam Research representative.
