Tóm tắt bài báo kỹ thuật ngành công nghiệp chip: ngày 14 tháng 10

New technical papers recently added to Semiconductor Engineering’s library:

Technical Paper	Research Organizations
Resolution enhancement for high-numerical aperture extreme ultraviolet lithography by split pupil exposures: a modeling perspective	Fraunhofer IISB and ASML
Novel STI Technology for Enhancing Reliability of High-k/Metal Gate DRAM	Sungkyunkwan University and Samsung Electronics
Flexible electronic-photonic 3D integration from ultrathin polymer chiplets	Dartmouth College and Boston University
Rethinking Programmed I/O for Fast Devices, Cheap Cores, and Coherent Interconnects	ETH Zurich
A Survey: Collaborative Hardware and Software Design in the Era of Large Language Models	Duke University and Johns Hopkins University
Tunable multistate field-free switching and ratchet effect by spin-orbit torque in canted ferrimagnetic alloy	UC Berkeley and Lawrence Berkeley National Laboratory
KeyVisor — A Lightweight ISA Extension for Protected Key Handles with CPU-enforced Usage Policies	CISPA Helmholtz Center for Information Security and Ruhr University Bochum