ASML to ship high-NA tool to TSMC this year – Bits&Chips
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TSMC will take delivery of a high-NA EUV system later this year, an ASML spokesperson confirmed to Bloomberg. The fact that the Taiwanese foundry has ordered a tool isn’t surprising, since ASML previously said that all current EUV customers have done so. But the timing of the shipment hadn’t been revealed until now.
TSMC recently voiced concerns about high-NA’s cost-effectiveness, prompting speculation that the firm might not be among the first to receive a tool. That’s not the case, but neither will it be a front-runner in high-NA adoption. That role has been assumed by Intel.
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